摘要
实现超纯镓生产的产业化,存在着产品质量的可靠性和稳定性两大问题.提出了对超纯镓纯度的定义,指出用GDMS分析方法,结合SI-GaAs或MBE GaAs膜的迁移率作依据,来确定超纯镓的纯度.在加强质保体系的同时,研究了先进的生产工艺,建成了年产15 t超纯镓的生产线,产品质量达到了法国GEO Gallium公司的水平.
There exist two problems that are reliability and of the quality of products, if we want to realize industrialization of super-pure gallium. The definition of super-pure gallium is proposed. Author consider that is available using the result of CDMS analysis and the mobility of SI-GaAs or MBE GaAs film as basis for determinations of quality of super-pure gallium. At the proceeding of improving quality assurance, we have researched advanced technologies, and established a workline that annual output is 15 tons super-pure gallium. The quality of products reached the level of GEO Gallium in France.
出处
《广东有色金属学报》
2006年第2期92-99,共8页
Journal of Guangdong Non-Ferrous Metals
关键词
镓
超纯
产业化
gallium
super-pure
industrialization
