摘要
The low-energy electron point source （LEEPS） microscope, which creates enlarged projection images with lowenergy field emission electron beams, can be used to observe the projection image of nano-scale samples and to characterize the coherence of the field emission beam. In this paper we report the design and test operation performance of a home-made LEEPS microscope. Multi-walled carbon nanotubes （MWCNTs） synthesized by the CVD method were observed by LEEPS microscope using a conventional tungsten tip, and projection images with the magnification of up to 10^4 was obtained. The resolution of the acquired images is -10 nm. A higher resolution and a larger magnification can be expected when the AC magnetic field inside the equipment is shielded and the vibration of the instrument reduced.
The low-energy electron point source （LEEPS） microscope, which creates enlarged projection images with lowenergy field emission electron beams, can be used to observe the projection image of nano-scale samples and to characterize the coherence of the field emission beam. In this paper we report the design and test operation performance of a home-made LEEPS microscope. Multi-walled carbon nanotubes （MWCNTs） synthesized by the CVD method were observed by LEEPS microscope using a conventional tungsten tip, and projection images with the magnification of up to 10^4 was obtained. The resolution of the acquired images is -10 nm. A higher resolution and a larger magnification can be expected when the AC magnetic field inside the equipment is shielded and the vibration of the instrument reduced.
基金
Project supported by the National Natural Science Foundation of China （Grant Nos. 60231010, 60471008, and 60571003） and the National Center for Nanoscience and Technology of China.
