基于正弦机构力放大原理的高灵敏度光纤光栅压力传感器

High sensitivity fiber grating pressure sensor based on force amplifying principle of sine mechanism

基于正弦机构力放大原理,设计研究了基于平面圆形薄板结构的新型高灵敏度光纤光栅压力传感器,研究表明,传感器的压力灵敏度可高达0.04711(pm/Pa),比裸光纤增敏了14989倍,可应用于超低量程压力的传感测量,而该封装结构易于传感FBG多路复用,组成传感器阵列。

Based on the force amplifying principle of sine mechanism, a high sensitivity fiber grating pressure sensor element with planar circular sheet structure was designed. Research indicates that the pressure sensitivity is up to 0.04711（pm/Pa）, which is about 14989 times the value of the bare fiber. This kind of sensor can be applied in the sensing measurement of very low-pressure, and this encapsulation structure is prone to multiplexing the sensing FBG to form a sensor array.