基于垂直方向位移扫描的接触式表面形貌仪

Contact Surface Contourgraph Based on Vertical Displacement Scan

为减小测量误差,设计了基于垂直位移扫描的接触式表面形貌仪。该测量仪以保持杠杆处于平衡位置为测量前提,X_Y向,Z向工作台分别采用衍射光栅为标准器;X_Y向工作台采用直线电机和压电陶瓷分别进行粗、细两级定位,Z向电机采用压电陶瓷驱动微定位。总体论述了该仪器的整体结构、测量原理、工作台的定位控制以及衍射光栅干涉信号的处理等内容。测量结果表明该系统有效地提高了测量精度。

In order to minimize the measurement error, the contact surface contourgaph is designed based on vertical displacement scan. The measuring presupposition of the instrument is maintaining the balance position of the level. The diffraction gratings are the standard that is mounting respectively for working benches in X, Y, and Z direction, linear motor and piezoelectric ceramic are the coarse and fine two stage positioning for X, and Y working benches, while the piezoelectric ceramic is the micro position for Z motor. The overall structure, measuring principle, positioning control of working benches as well as the interference signal processing of diffraction grating are expounded. The results show that using the system enhances the accuracy of measurement.