热反射玻璃镀膜工艺的研究

Study for the Technology of Deposition Heat Mirror Films on Glass

本文采用直流磁控溅射方法，对氧化不锈钢膜、金属Ｔｉ膜、ＴｉＮ膜和ＴｉＯｘＮｙ膜在不同工艺和不同组合条件下形成的两层膜系热反射镀膜玻璃的光学性能及有关组份进行了测试分析，阐明了该种方法及该种系列工艺条件下镀制热反射玻璃镀膜的性质，提出了此工艺条件镀制两层膜系热反射玻璃镀膜的最佳组合工艺。

The paper studies the optical and component properties of two layer heat mirror films deposited by DC magnetron sputtering means.A good deposition technology of this way heat mirror film is suggested.Some problems connected with industry architectural glass film production are also discussed here.