摘要
叙述多碱阴极这种制作工艺简单而性能优良的半导体光电发射材料的应用，通过对多碱阴极制造过程中其横向电阻和光电流监控的原理分析，阐明多碱阴极的形成过程，提出改进多碱阴极制作工艺的措施。
The applications of multi-alkali cathod, a semiconductor photoemission device having good performance and built by a simple technology are described. Through the principle analysis of monitoring its lateral resistance and photocurrent during the manufacturing process of multi-alkali cathod, the formation process of multi-alkali cathod is presented and some measures for improving the manufacturing technology of multialkali cathod are proposed.
出处
《应用光学》
CAS
CSCD
1996年第4期29-33,共5页
Journal of Applied Optics
关键词
多碱
阴极
横向电阻
光电流
multi-alkali cathod
lateral resistance
photocurrent
