金刚石薄膜质量的拉曼光谱与红外光谱判定

Assessment of the Quality of Diamond Films by Using Raman and Infrared Transmission Spectroscopy

根据ＤｉＤｏｍｅｎｉｃｏ公式并采用计算机模拟计算了金刚石薄膜中的ｓｐ２／ｓｐ３键价比，计算中不仅考虑了ｓｐ３相及ｓｐ２相拉曼线１３３２ｃｍ－１，１５８０ｃｍ－１，同时考虑了“Ｄ”线１３５５ｃｍ－１存在，这一计算给出了金刚石薄膜质量的定量评估方法。当金刚石薄膜质量较高时，由于仪器灵敏度限制，其拉曼光谱中显示不出ｓｐ２相宽带结构情况下，无法采用拉曼光谱判定薄膜质量。在此情况下。

sp 2/sp 3 bonding ratio of diamond thin film has been calculated by Using the DiDomenico formula and computer fitting. Three of the Raman lines at 1332cm -1 for the sp 3 phase,1580cm -1 for the sp 2 phase,and the “D” line at 1355cm -1 are considered in the calculation. This method can give a quantitative assessment of the quality of the films. However this quantitative assessment is useless when the broad band of sp 2 phase cannot be resolved in the Raman spectrum because of in limitation sensitivity. In this case, a diagnostic technique utilizing infrared transmission spectroscopy to calculate the effective number of electrons per atom in diamond thin film is presented.