基于多功能加工平台的微细电解加工工艺

The Electrochemical Micromachining Based on Multifunction Tool for Micromachining

利用多功能微细加工平台的微细电火花加工技术为微细电解加工在线制作微细电极,在低浓度钝化电解液、低加工电压和高频窄脉冲电流加工条件下,利用高速旋转工具电极和微电流密度下电解钝化作用,实现了微米级的微细电解加工.通过工艺实验,研究电压、电解液浓度和进给速度等参数对加工间隙的影响,优化工艺参数.在优化加工条件下,在厚为100μm的不锈钢薄片上微细电解钻削出65μm的微小孔.针对成型电极在微细加工中暴露出的缺点,提出了利用旋转微细电极像微铣刀一样进行微细电解铣削新工艺,加工出高精度型孔和悬臂梁等微结构.

Through the development of multifunction tool, the micro electrodes for electrochemical micromachining （EMM） can be fabricated on-line by micro electrical machining voltage, low passivity electrolyte concentration and discharge machining （EDM）. Under low high-frequency short-pulse current, theEMM at micro-scale can be realized by using rotary electrode and electrolytic passivation effect. By processing experiments on drilling micro holes by EMM, the influences of the machining parameters on machining gap were explored, such as machining voltage and electrolytic concentration. Micro hole with 65 μm diameter on the stainless steel plate with 100 μm thickness is drilled by EMM at an optimized parametric combination. The new process of electrochemical milling by rotating microelectrode like micro millingcutter was proposed, and micro profiled hole and micro beam with high precision can be milled.