摘要
利用各向同性腐蚀液制备了硅微尖阵列。
The silicon tips array was fabricated using isotropic etching. The fabricated condition affecting the shape of tips were researched.
出处
《发光学报》
EI
CAS
CSCD
北大核心
1996年第4期341-345,共5页
Chinese Journal of Luminescence
关键词
真空
微电子
场发射
硅微尖阵列
SEM
vacuum microelectronics, field emission, silicon tips array, SEM
