一种MEMS CAD系统级到工艺级版图生成技术

Interface Technology of MEMS CAD System Level Design with a Standard Layout Output

采用自定义版图转换技术设计了MEMS系统级到工艺级之间的数据传递接口,通过对系统级设计得到网表文件的信息读取,提取了其中组件的版图信息、位置信息以及连接信息等将系统级设计结果,自动转化为二维标准版图文件,为实现“自顶向下”设计,进行器件版图编辑、掩膜板设计提供了一种有效的途径。

A MEMS CAD interface from system level to process level has been designed using the 2D layout technology. From the netlist of the system level design it can be transfer to a 2D layout model with the approach of pick up the iniormation, information management and model building, at last a standard layout model file has been creates. It provides a effective approach of the ＂top down＂ design and mask design of MEMS.