数字仿真形貌影栅云纹法及实验系统的原理

Basic Principles of Digital Simulation Shadow Moiré Profilometry and Its Experimental System

基于影栅虚云纹场的概念,提出并实现了对形貌影栅云纹法利用计算机布置影栅云纹仪各种光场,自动生成高质量全场仿真影栅云纹图,建立了一种数字仿真形貌影栅云纹法自动测量和处理一体化实验系统(全文简称为实验系统)·系统特别适合于作为形貌影栅云纹法误差分析的评估系统,对光场布置不同的影栅云纹仪及其对应的相移值近似程度不一样引起的初始系统误差进行分析、预测和评估,给出减少这种系统误差应遵循的准则·

A digital simulation shadow moire techniques is proposed that includes the auto-design of arrangements for shadow moiré instruments and the auto-production of shadow moiré fringe patterns by computer, based on the concept of the virtual shadow moiré field. A new experimental system of the digital simulation shadow moiré profilometry is also built up, which can not only be used to reconstruct profiles of obiect surface efficiently, but also be used as an error analysis and evaluation system. The parameters of several optical arrangement cases of the shadow moiré instruments were analyzed by using the experimental system. The key data of the arrangement parameters are provided, which play important roles in controlling the maximum original system relative error less than 5 %. These data may be used for rationally designing shadow moiré instruments in the experimental system. The digital simulation shadow moiré profilometry proposed in this paper is helpful to promote the development and perfection of the whole shadow moiré profilometry.