摘要
随着电子及信息产业突飞猛进的发展,世界溅射靶材的需求量越来越大。文章介绍了溅射靶材的种类、应用及制备情况。并对靶材的发展趋势作了探讨。
The demand for sputtering target materials are increased with the rapid development of the electronic and information industries in the world. The kinds, application, manufacture and develoing trend of sputtering target materials are presented in this paper.
出处
《湖南有色金属》
CAS
2006年第4期38-41,76,共5页
Hunan Nonferrous Metals
关键词
溅射
靶材
种类
应用
制备
发展趋势
sputtering
target materials
kinds
application
manufacture
developing trend
