摘要
基于刚性运动学理论建立了二维超精密工作台运动测量模型,并在此基础上使用辅助测量装置的三个测量位姿和二维傅里叶变换提出了二维超精密工作台自标定算法;通过应用实例验证了该算法的可行性和有效性。
The measurement model of two-dimensional ultra-precision stages is developed based on rigid body kinematics. According to this model the self-calibration algorithm of 2-D ultra-precision stages is presented using three measurement views of the artifact and the 2-D Fourier transfer method. An example is presented to verify the feasibility and availability of the given selfcalibration algorithm.
出处
《工具技术》
北大核心
2006年第7期12-16,共5页
Tool Engineering
基金
国家973重点基础研究发展计划项目(项目编号:2003cb716204
2004CB318007)
关键词
超精密
二维工作台
自标定
ultra-precision, two-dimensional stages, self-cahbration
