体硅MOEMS阵列光开关的制作

Fabrication of the Bulk Silicon MOEMS Optical Switch Array

设计了一种新型结构的MOEMS阵列光开关,开关由上电极阵列、倾斜下电极阵列和准直光纤阵列三部分组成。上电极阵列利用(110)硅片制作,其中包括反射镜阵列和扭臂驱动结构的上电极阵列。具有集成性好,制作工艺简单,微反射镜的表面平整垂直,各单元的微镜面平行,反射镜面的尺寸较大等优点。对光开关的参数进行了测试,指出了体硅MOEMS阵列光开关制作过程中存在的问题。

A novel MOEMS optical switch array was proposed, including upper electrode array, counter electrode array and collimation optical fibers array. The upper electrode array was fabricated on （110） silicon wafer, including reflective mirror array and upper electrode of torsion beam actuator. The optical switches have many advantages, such as simple process, smooth and vertical surfaces of reflective micro mirrors, parallel reflective micro mirrors on every unit, large dimension of reflective micro mirror. The parameters of optical switches were tested. The drawback of bulk silicon MOEMS optical switches was indicated.