摘要
提出了一种新型的梁膜结构,其体积较小、应力集中效应明显,特别适合作小量程应变式压力传感器。通过有限元分析发现,当膜片厚度与梁厚度为某一比值时,膜片中心应力值最大,而位移量较小,即传感器灵敏度较大,而非线性较小。设计的传感器样品的灵敏度达0.5 mV/V,总精度优于0.1%F.S。
A novel beam - membrane structure was proposed, with a small size and obvious effect of centralizing stress, especially fitting low scale pressure sensor of strain type. Finite Element Analysis shows that there exists a thickness ratio between the membrane and the beam that the stress at the centre of the membrane reaches its maximum at a small displacement, hence the sensor is highly sensitive with a small non -linearity. The sensitivity of the sample sensor designed is 0.5mV/V, and its whole precision exceeds 0.1% F.S.
出处
《西南科技大学学报》
CAS
2006年第2期63-65,共3页
Journal of Southwest University of Science and Technology
关键词
应力
量程压力传感器
有限元分析
stress
scale
pressure sensor
Finite Element Analysis
