用光栅的正负一级能量之比测量光栅参数的可行性研究

The feasibility of determining the grating parameters with the diffraction ratio ±1 orders

提出了一种利用光栅透射光谱的正负一级能量之比,通过结合正单纯形优化算法反演衍射光栅参数的新方法。在理想光栅(以正弦面型光栅为例)透射光谱曲线上叠加高斯噪声模拟了实验测量曲线;通过结合正单纯形优化算法进行模拟反演得到了光栅的折射率和光栅深度等参数。结果表明,相对误差小于2%,具有无损伤、操作简便、可重复、易推广、成本低等优点。

A new method for determining the grating parameters was presented, in which the efficiency ratio of m =±1 in the transmission spectrum and the optimized algorithm were used. Experimental curves were simulated by adding the Gauss noise on transmission spectrum of the academic grating, and the optical parameters of the grating were calculated by the optimization method-Normal Simple Algorithm. The results are very near to the true value, and its relative error is not over 2%. The results demonstrate the reliability and the credibility of the metrology. At the same time, it has some advantages as no damage, simplicity of measurement, facility of manipulation, and repeat, easy generalized and low cost and so on.