摘要
本文以光散射法测量磨削表面粗糙度为例，研究光散射法光学特征值Ｓｎ和表面粗糙度主要参数Ｒａ的对应关系；特别是针对研磨表面建立的Ｒａ－Ｓｎ关系曲线图，在较大的测量范围内（Ｒａ从０．０１０μｍ－０．０６６μｍ），Ｒａ和Ｓｎ存在较好的线性对应关系，表明光散射非接触测量表面粗糙度更适合对较光滑表面的粗糙度进行无接触、快速检测。
In the paper, taking banding as example, we studied the relationship between optical scattering characteristic value Sn and surface roughness main parameter Ra. Eespecially,Ra Sn relationship curve for lapping specimen is given.There is a better linear function relationship between Ra and Sn in a larger measuring range (Ra from 0.010 μm to 0.066 μm). It shows that optical scattering noncontact measuring roughness is suitable to measure smoother surface roughness noncontactly and fast.
基金
四川省科委资助
关键词
光散射法
表面粗糙度
光学特征值
测量
optical scattering method
surface roughness
curve diagram
