摘要
采用常压金属有机化学气相沉积技术在Al2O3(0001)衬底上生长出高质量的ZnO薄膜.用X射线双晶衍射ω和θ-2θ扫描、室温光致发光研究了不同生长温度对ZnO薄膜的结构、发光性能的影响.结果表明,随着生长温度的升高,ZnO薄膜的c轴晶格常数逐渐增大,a轴晶格常数逐渐变小,同时带隙相应逐渐增大.
High quality ZnO thin films are grown on A12 03 （0001）substrates by atmospheric-pressure metal organic chemical vapor deposition （AP-MOCVD）. Effects of growth temperature on the structure, optical characteristics of ZnO thin films are investigated by double crystal X-ray diffraction （ω and θ-2θ scans） and room temperature photoluminescence（PL） spectra. With the rise of the growth temperature,the c-axis lattice constant of the ZnO films increases while the bandgap becomes wider.
基金
国家高技术研究发展计划(批准号:2003AA302160)
电子信息产业发展基金资助项目~~
