离子源放电电流对真空室压力影响机理研究

Mechanism of discharge current affecting pressure in vacuum chamber

揭示了真空室压力随离子源放电电流增长,而且在不同的气流速率时的增长率不同这一现象,并对其机理进行了分析,认为真空室压力随放电电流的增长主要是离化粒子束流密度的增长引起的,当然离化粒子的平均能量的增长也起了作用,而在不同气流速率时该压力增长率的不同则主要是因为在不同的气流速率时离化率不同。

Reveals that the pressure in vacuum chamber increases with discharge current of ion source, then analyses its mechanism. It＇s deemed that the increase in pressure is mainly caused by the increase in ionized particle beam current density and, in addition, by the increase in the mean energy of the ionized particles. However, the increment of the pressure in vacuum chamber will change mainly because of the different ionization rates when the gas flowrate changes.