摘要
介绍了前苏联生产的ＨＨＢ－６６－Ｍ１型多弧离子镀膜机的技术条件、结构形式、性能特点。与美国ＭＵＬＴＩ－ＡＲＣ公司生产的ＭＡＶ－３２Ｄ多弧离子镀膜机的性能进行了对比分析。
The engineering factor, construction model, mechanical features of HHB-66-H1 multi arc ion coating equipment that is made in USSR have ben introduced. Forthermore comparision and analyais have been done with MAV-32 D multi arc ion coating equipment that is made in MULTIARC company of USA.
出处
《真空与低温》
1996年第1期39-42,共4页
Vacuum and Cryogenics
