摘要
为提高超高真空系统的极限真空，在加热烘烤期间用干燥气体冲洗法进行了各种试验。结果表明：冲洗的比不冲洗的极限真空要好；间断冲洗的比连续冲洗的极限真空要好。这对如何提高真空系统的极限真空提供了一定实验依据。
In order to improve the ultimate vacuum of a UHV system, the gas purging methodwas used for several tests when the system were baked. The results showed that the ultimate vacuumwas really improved when the vacuum system was purged with dry gas and it was batter to use interval the purging method rather than the continous way. All these provide some experiment proof forthe production of ultrahigh vacuum.
出处
《真空与低温》
1996年第2期78-80,共3页
Vacuum and Cryogenics
