摘要
金刚石在红外区具有很好的透过率，可用作红外光学保护材料。另外，金刚石又具有优越的机械、热学、化学性能，可镀在其它红外材料上作为保护膜。用热丝化学气相沉积法在硅晶片上镀了一层金刚石膜，测量其红外透过率，在２．５～１５μｍ波长范围内透过率都有所增加，最高处透过率从５２％提高到６４．１％。
s: Diamond is good optical protective material for its excellent transmittivity in infrared range. Moreover, diamond has advanced mechenical、 thermal and chemical properties, which can be used as protective films coated on other infrared devices. We have deposited diamond thin films on Si wafer. The infrared reflection of Si wafer coated diamond film is reduced in the wave range of 2.5～15 μm, and its maximum increment of transmittivity is from 52% to 64.1% at 8 μm.
出处
《真空与低温》
1996年第3期131-133,共3页
Vacuum and Cryogenics
关键词
金刚石薄膜
红外增透
保护膜
薄膜
Diamond thin films, Infrared reflection reducing, Hot filament CVD, Protective films.
