氮化铝陶瓷的低温烧结研究

Research on low-temperature sintering of AlN ceramics

采用了三种复合添加剂Y2O3-CaF2、Y2O3-Dy2O3和Y2O3-Li2O,在1 650℃热压烧结AlN陶瓷;测定、分析了AlN陶瓷的性能和微观结构。结果表明,添加该三种复合助剂在低温烧结的AlN陶瓷晶格氧含量均较低,样品热导率较高,尤其是添加复合助剂Y2O3-CaF2可获得热导率为192 W.m-1.K-1的AlN陶瓷样品。

AlN ceramics doped with Y2O3-CaF2、Y2O3-Dy2O3 and Y2O3-Li2O were sintered at 1 650 ℃. The properties and microstmcture of hot-pressure sintered AlN ceramics were measured and studied in this paper. The results show that AlN ceramics sintered in this way have a lower oxygen content and higher thermal conductivity. The thermal conductivity of AlN ceramics, especially doped with Y2O3 and CaF2 ,is as high as 192 W/（m· K）.