超高真空扫描隧道显微镜定位系统的研制

Development of Precise Locating System of Ultra high Vacuum Scanning Tunneling Microscope

本文介绍了超高真空扫描隧道显微镜（ＵＨＶ－ＳＴＭ）定位系统的设计方法，并对误差进行了分析和修正。定位系统在操作范围为－５６０～＋５６０ｎｍ时的定位精度达到了０．１ｎｍ，该系统性能稳定，运行可靠。

The method of designing precise locating system of an ultra high vacuum scanning tunneling microscope (UHV STM) is introduced. The errors of the system have been analyzed and revised. The setting accuracy of system is 0.1nm in the 560～+560nm operation range. The precise locating system in stable and reliable.