正压氦质谱检漏灵敏度的校准和微流量的测量

In Situ Sensitivity Calibration for MSLD in Pressure Leak Testing Mode and Micro-Flow Rate Measurement

本文讨论了常用正压氦质谱检漏方法中实现灵敏度校准需要解决的主要问题。提出了几种简单的微流量测量方法，估算了其检测限，讨论了影响测量精度的一些因素。对吸枪法正压检漏灵敏度的实时校准进行了实验研究。

Abstract The problems existing in the sensitivity calibration for MSLD in pressure leak testing mode are discussed in this paper.Several simple methods for micro-flow rate measurements are presented and the detection limits are estimated.The factors affecting the measurement accuracy are discussed.In situ sensitivity calibration for MSLD in pressure leak testing mode by sniffer has been studied experimentally.