超导／半导兼容技术在微电子技术中的应用

The Applications of Superconductor/Semiconductor Compatible Technology in Microelectronics Technology

该文针对ＶＬＳＩ系统集成度提高后产生的一些问题，提出了将超导／半导兼容技术应用于微电子技术中，并对超导／半导兼容材料的制作以及超导／半导兼容技术，包括超导引线、超导／半导兼容器件与ＩＣ、超导／半导混合ＩＣ进行了讨论．

In this paper,the applications of superconductor/semiconductor compatible technology in microelectronics technology is proposed in the light of the problems produced by the raising of the density of VLSI.The preparation of superconductor/semiconductor compatiblematerial and the application of superconductor/semiconductor compatible tochnology including superconducting interconnect,superconductor/semiconducto compatible devices and IC superconductor/semiconductor hybrid IC are discussed in the other parts of this paper.