永磁端引出溅射PIG源进展

PROGRESS OF AN END EXTRACTION SPUTTERING PIG ION SOURCE WITH PERMANENT MAGNET

介绍了永磁端引出溅射ＰＩＧ离子源的进展状况，通常它可用于引出气体的与金属的单或多电荷离子，在２０－３０ｋＶ的引出电压下，可引出ｍＡ级的气体离子和数十微安的金属离子，功耗小于５０Ｗ。同时也可用于直接引出某些电子亲合势较强的气体元素，如Ｈ、Ｏ、Ｆ等的负离子。当采用ＬａＢ６阴极，在１５－２０ｋＶ的引出电压下，引出的总束流中，Ｈ－离子＞５０μＡ，０－离子接近１．４ｍＡ和Ｆ－离子可达１．８ｍＡ，功耗分别为４０、５０和７５Ｗ左右。

Progress of an end extraction sputtering PIG ion source with permanent magnet is introduced in the paper. Usually it is suitable for extracting single or multiple charged ions of gas and metal.At 20-30 kV extraction voltage, about mA of gas ions and tens of μA of metal ions are extracted,and the discharge power consumption less than 50 Watts. The negative ions of some elements with larger electron affinity, such as H, O and F, can be extracted directly. Using LaB6 cathode and at 15-20kV extraction voltage, more than 50 μA of H-, about 1. 4 mA of O- and 1. 8 mA of F- in total beam are extracted, the power consumption are about 40, 50 and 75 W, respectively.