ZnTe　MOCVD过程中金属有机源双甲基锌和双异丁基碲热裂解研究

STUDY OF PYROLYSIS OF Me 2Zn AND Pr i 2Te DURING ZnTe MOCVD

利用与ＭＯＣＶＤ系统相连接的四极质谱仪实时研究了金属有机源Ｍｅ２Ｚｎ和Ｐｒｉ２Ｔｅ在反应器中热裂解行为。报告了纯态Ｍｅ２Ｚｎ和Ｐｒｉ２Ｔｅ及其混合物在Ｈ２和Ｈｅ气氛中的热裂解实验结果，并进行了分析讨论，导出了可能发生的气相反应及热裂解机理。此外还探讨了Ｍｅ２Ｚｎ和Ｐｒｉ２Ｔｅ共裂解行为对ＺｎＴｅ外延生长的影响。

Pyrolysis behavior of Me 2Zn and Pr i 2Te in a reactor has been investigated by a quadrupole mass analyzer directly connected to a MOCVD system. The pyrolysis results of Me 2Zn and Pr i 2Te, both alone and in combination, in both H 2 and He carier gases are reported. The experimental phenomena are discussed and possible gas phase reactions and pyrolysis mechanism are suggested. In addition, the influence of precursor pyrolysis on ZnTe grown by MOCVD is also explored.