斐索型球面干涉仪移相误差的探讨

RESEARCH ON PHASE-SHIFTING ERRORS IN A SPHERICAL-WAVE FIZEAU INTERFEROMETER

本文对斐索型球面干涉仪的移相原理误差进行了理论推导和计算；应用移相干涉术的三步法和五步法，分析和比较了球面移相误差对波面复原精度的影响，并给出了有关数据和曲线。最后，提出了几种减小球面测量误差的措施。

This paper studies and calculates the phase-shifting errors in a spherical-wave Fizeau interferometer,analyses and compares the effects of spherical phase-shifting errors on accurary of wavefront retrieval using 3- frame and 5-frame methods,whose relative data and curves are given, Finally,Several methods of reducing spherical measurement errors are proposed and discussed.