线性调频激光双干涉仪绝对距离测量的研究

Research on Absolute Distance Measurement with Double-Interferometer Using Linearly Frequency-Modulated Laser

提出一种双干涉仪绝对距离测量方法,利用参考干涉仪的误差补偿作用,有效地抑制了激光器光学特性相关误差源对外腔半导体激光器线性调频绝对距离干涉测量系统的影响,提高了测距精度。文中介绍了测量原理和实验装置,作了误差补偿分析,并给出实验结果。

-A method of absolute distance measurement with double-interferometer using external cavity semiconductor is presented. The reference interferometer in the system effectively compensate the errors resulted from the optical properties of the laser. So the measuring accuracy of the system is improved. The principle of measurement and the configuration of the experimental setup are introduced. The compensation of the errors is analyzed. Some experimental results are given.