基于进口膜片的光纤光栅压力传感器的研究

Studies on Fiber Bragg Grating Pressure Sensor Based on the Import Diaphragm

分析了光纤布喇格光栅(FBG)的压力传感特性,给出了FBG的中心波长与压力的关系以及压力灵敏度系数的表达式,并将FBG纵向粘贴在富士公司生产型号为FBC 20WB2的膜片上进行了压力实验。实验结果表明粘贴在FBC 20WB2型膜片上的FBG压力传感器的灵敏度系数为0.376 nm/MPa左右,其测量精度在满量程范围内为1%,而理论的压力灵敏度系数为0.385 nm/MPa。同时发现粘贴在该膜片上的FBG压力传感器的中心波长与压力变化有着良好的线性关系和很高的相关系数并且迟滞现象较小,说明基于该膜片的FBG压力传感器非常适合于压力测量。

The pressure sensor characteristic of fiber Bragg grating（FBG） was analyzed, the relation between the central wavelength of reflection wave of FBG and pressure was given, and the expression of the pressure sensitivity coefficient was also given. The pressure experiments were carried out on the FBC20WB2 diaphragm produced by Fuji Electric Co. ltd. The experimental results indicated that the sensitivity coefficient of FBG pressure sensors on the FBC20WB2 diaphragm was about 0. 376 nm/MPa, its measurement precision was 1%. Whereas the theoretical pressure sensitivity coefficient is 0. 385 nm/MPa. At the same time there was a very good linearity and repetition between the center wavelength of FBG pressure sensor and pressure change on the diaphragm, and there was scarcely hysteresis effect. The study indicates that FBG pressure sensor based on the diaphragm is very fit for pressure measurement.