压电式执行器用于超精密进给机构的技术研究

Study of Key Technique on Ultraprecision Feeding Mechanism with Piezoelectric Actuator

通过对压电陶瓷微位移执行器动态特性问题的研究,设计了一种可微机控制的数字高压信号源作为电压调节器、压电陶瓷作为驱动器的精密微动平台。针对高精度的定位和进给需要,设计了数字闭环控制系统,引入数字比例-积分-微分(PID)模糊控制器以提高系统的动态特性。实验表明,该控制系统简单、可靠、实用,所提出的校正方法对改善压电陶瓷微位移执行器的动态特性有显著效果,现已将其用在磨床进给机构中。

The problem of slow step response in piezoelectric actuator is studied and an ultraprecision feeding mechanism is designed which is composed of a precise digital high-voltage adjustor and piezoelectric actuator. To meet the need of high-precision positioning and feeding, a PID Fuzzy Controller is adopted to improve the performance of the micro-feeding system. The closed loop system has the features of quick responding speed, simple structure and high reliability, and realizes rapid respond of micro-feeding mechanism. It has been applied to ultraprecision grinder.