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微晶硅材料及其在太阳能电池中的应用 被引量:10

Microcrystalline Silicon And Its Application In Solar Cells
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摘要 微晶硅(μc-Si:H)是国际公认的新一代硅基薄膜太阳能电池材料。综述了微晶硅的基本特性,器件质量级材料的表征参量,材料的生长技术,微晶硅在太阳电池中的应用及其发展前景。 Microcrystalline silicon is commonly regarded as the next generation material for Si-based thin film solar cells. Properties, characteristic parameters for device-grade material, growth techniques application and prospect in solar cells of microcrystalline silicon are reviewed.
出处 《激光与光电子学进展》 CSCD 北大核心 2006年第8期48-55,共8页 Laser & Optoelectronics Progress
基金 天津市科技发展计划项目(No.06YFGZGX02100) 教育部光电子信息技术科学重点实验室开放课题(No.2005-18) 南开大学博士启动基金(No.J02033)
关键词 微晶硅 转化效率 等离子体增强化学气相沉积 太阳电池 microcrystalline silicon conversion efficiency PECVD solar cells
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参考文献28

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