摘要
借助测量微加工薄膜变形镜驱动器的面形影响函数,分析了驱动器的电压-位移函数和驱动器之间的线性叠加性;通过对连续面形变形镜拟合像差的理论分析和实验研究,建立了微加工薄膜变形镜电压解耦模型。分析了对前36阶Zernike模式的拟合残差和拟合能力,指出微加工薄膜变形镜仅可用来拟合低级像差并且有较大的拟合能力和较小的拟合残差,而不能拟合高级像差。
The function between voltage and displacement of actuator and the linear superposing of the actuators for micromachined membrane deformable mirror are analyzed by means of the measured influence function of actuators. The voltage decoupling model for micromachined membrane deformable mirror is established through theoretical and experimental analysis of the fitting aberration of a continuous-surface deformable mirror. The fitting of the former 10-order Zernike mode is carried out. Analyzing the residual fitting error and correction capacity to the former 36-order Zernike mode, the conclusion is that micromachined membrane deformable mirror can be applied to correct the low order aberrations （especially for the former 10-order Zernike mode, with which it has a larger correcting capacity and a less residual fitting error） but not the high order one.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2006年第7期1099-1103,共5页
High Power Laser and Particle Beams
基金
中国科学院光电技术研究所所长基金资助课题
中国科学院基金资助课题
关键词
自适应光学
微加工薄膜变形镜
拟合能力
干涉仪
Adaptive optics
Mciomachined membrane deformable mirror
Fitting capacity
lnterferometer
