旋转涂层法制备聚酰亚胺薄膜

Fabrication of polyimide film by spin coating

研究了采用二酐和二胺合成聚酰胺酸溶液，利用旋转涂层法制备聚酰亚胺薄膜的方法并对成膜机理进行了初步探讨。研究表明：在固定旋转时间时，通过控制合成聚酰胺酸的浓度和旋转速度可基本上控制薄膜的厚度，旋转涂膜法制备的聚酰亚胺薄膜厚度起伏小于5％，薄膜表面光洁度达到0．3～0．4nm，0．3μm厚聚酰亚胺薄膜的弹性模量为50～80MPa。

Spin coating can be controlled by a few parameters such as the rotating speed and solid density to yield a well-defined film, which can often be used to create highly uniform coatings. Solid pyromellitic dianhydride and 4,4-oxydianiline were added to N,N-dimethyl acetamide to form polypyromellitamic acid solution and films were cast from the solution. The paper focu- ses on fabrication of high quality polyimide on the basis of experiments especially for uniformity film thickness and good film properties. It implicates that the rotating speed and fluid density have strong effects on the film thickness. Under suitable experiment condition polyimide film can be fabricated with suitable thickness. The film thickness fluctuation is no more than 5 %, and the film surface finish 0.3～0.4 nm. The tensile strength is 50～80 MPa with a thickness of 0.3 mm.