气敏闭室测量相关实验现象与理论分析

Gas Sensor with Closed-Room Experimental Phenomenon and Theoretical Analysis

采用闭式实验测量方法测试了微型平面薄膜元件,对出现的过冲弛豫现象产生机理采用扩散模型进行了物理过程分析,并进行了仿真。给出了气敏元件反应放热率Prea与Δttea反应温变的关系式,据此对还原气体分子表面反应几率进行了研究,并对闭室测试中浓度的衰减进行了分析,浓度衰减慢过程的结果验证了闭式测量与流通测量的一致性结论。

A closed-room experimental method to study micro gas sensor during sensing reaction are proposed. The electrical conductivity response shows the over-shot phenomenon. The physical procedure and law have been studied and imitated by using diffusion model and imitated. The formula of reaction exothermic rate Prea and △ttea versus gas concentration have been given. The surface reaction probability of reduction gas is studied also. Through the research of gas attenuation tested in the airtight room, the result is that the gas attenuation is a slow process. It shows that the closed-room experimental results are as same as the gas enter open room experimental results.