新颖的高灵敏度双金属层结构表面等离子波传感器的研究与优化设计

Research and Optimization on Novel SPW Sensor with a High Sensitivity by Using the Double Metal Layers Structure

为了克服传统的表面等离子波传感器中金膜与玻璃棱镜基底附着力不足的缺陷,在金膜与棱镜之间增加一层银膜,从而有效地增加了金属膜与玻璃棱镜的附着强度,并增加了设计的自由度,通过基因算法对两金属层厚度优化设计,使得现在的设计不仅结构更加稳定,而且探测的灵敏度和线性度比起原有设计都得到有效提高。

For a traditional SPW（surface plasma wave） sensor , the gold coating can not accrete on the surface of the silicon prism tightly, which decrease the life period of the sensor. In the present paper, a novel structure is introduced by adding a silver layer between the gold layer and the prism in order to improve the adhesion intensity. The added layer gives more freedoms for design （i. e. , the thickness of the silver and gold layers）. Based on a GA（gene algorithm） method, we obtain the better performances （e. g. , sensitivity and linearity） compared with the traditional design.