化学气相沉积法连续SiC纤维的研究现状和发展趋势

Progress and Prospect of CVD Continuous SiC Fibers

综述了采用化学气相沉积法制备连续SiC纤维的研究进展,介绍了国内外化学气相沉积法制备的大直径、致密和均匀的SiC纤维的制备装置、制备工艺、性能、微观组织以及表面处理等热点研究方向,讨论了SiC纤维的制备工艺、性能和微观组织之间的关系以及利用表面处理如何弥补SiC纤维的缺陷,指出了今后采用化学气相沉积法制备连续SiC纤维的研究重点和发展趋势。

The progress of CVD SIC filament is described in this paper. Dense and uniform SiC filament with large diameter is commonly manufactured by means of CVD. Some recent focuses including SiC filament＇s process parameters, properties, microstructure and surface treatment are introduced, Moreover, the relationship between process parameters, properties and microstructure of SiC filament are discussed. And how to make up defect of SiC filament using surface treatment is investigated. Further research directions and focus are pointed out.