组件化可重构半导体生产线调度体系结构

Modular and Reconfigurable Framework for Semiconductor Wafer Fabrication Lines

在分析半导体生产线调度分类的基础上,提出了组件化可重构半导体生产线调度体系结构.根据该体系结构,不同类型的企业可以按照自己的生产特点动态选择适合自己的调度结构,以获得最佳的生产性能.

Based on the classification on the scheduling for semiconductor wafer lines, the modular and reconfigurable framework is proposed. According to the proposed framework, different types of semiconductor manufacturing enterprises are able to select the appropriate scheduling structures in term of their production characteristics to achieve the optimal production pedormances.