中低合金钢中多元素的射频辉光放电发射光谱发射谱线性质的研究

Investigation on emission characteristics of radio frequency glow discharge optical emission spectrum for multi elements in middle-low alloy steel

考察了射频辉光放电发射光谱法中功率（5～18w）和放电气压（5～15Torr）对元素谱线发射强度及相对强度稳定性的影响，并分析了引起影响的原因。结果表明，功率越高，发射强度越大；放电气压对各元素谱线发射强度的影响各异。在气压6～12Torr范围内，除5W外功率变化对大多数元素相对强度稳定性影响较小，相对标准偏差介于0．5％～2％。当功率在12w时，在10Torr气压下测定中低合金钢标准样品中C，Si，Mn，P，S，Cr，Ni，W，Ti，Cu，Co，B，Al，V，Mo，Nb16种元素，测定值与认定值一致；相对标准偏差除P，S，B稍高外，其它元素为1％～5％。

The influence of power （5- 18 W） and discharge pressure （5 - 15 Torr） on emission intensity of element and stability of intensity ratios in middle-low alloy steel using radio frequency glow discharge optical emission spectrometry （rf-GD-OES） were investigated, and the reasons of the influence were analyzed. The results indicated that higher the power was, the stronger the emission intensities were, but emission intensities of different elements varied greatly with pressure. In the pressure range of 6 - 12 Torr, the relative standard deviations of relative intensities of most elements are in the range of 0.5 % - 2 % at different powers except for 5 W. C, Si, Mn, P, S, Cr, Ni, W, Ti, Cu, Co, B, Al, V, Mo, Nb in middle-low alloy standard samples were determined under the conditions of 12 W of power, 10 Torr of discharge pressure, and the results were argreement with the certified values. The relative standard deviations are 1% - 5 % except for P, S, B.