摘要
结合已报道的微型光谱仪,介绍了微电子机械系统技术在多种微型光谱仪中的应用,详细阐述了这些微型光谱仪的原理和相应的制作工艺,并展望了随着微电子机械系统技术的发展,微型光谱仪的应用前景和发展趋势。
According to the researches reported, the applications of micro electro mechanical system technology (MEMS) in several kinds of microspectrometer are introduced. The principle and fabrication technology of these microspectrometers are discribed. The potential application areas and development tendency of microspectrometer are also presented.
出处
《冶金分析》
EI
CAS
CSCD
北大核心
2006年第4期40-46,共7页
Metallurgical Analysis
基金
河北省教育厅科研项目(No.2004408)
关键词
微电子机械系统技术
微机械加工技术
微型光谱仪
研究
进展
micro electro mechanical system technology
micromachining technology
microspectrometer
investigation
progress