电容式微机械陀螺品质因子测试方法研究

A Research on the Testing Method for the Quality Factor of Capacitive Microgyroscopes

品质因子是判断微结构加工质量的重要标准,特别是经过真空封装的微机械结构,它的品质因子大小可从几百到几万,具有很大的散布范围,因此对真空封装微机械陀螺品质因子的测试就显得格外重要.本文详细阐述了电容式微机械陀螺品质因子测试的基本原理,提出对静电激励-电容检测陀螺和机械激励-电容检测陀螺品质因子测试的具体方法,并对这两种方法的测试结果进行了对比分析.

Quality factor is an important criterion for judging the quality of microstructure, particularly for that of the microstructure in vacuum encapsulation. The quality factor of microstructure being vacuum encapsulated varies from hundreds to thousands; testing the quality factor of vacuum encapsulation micromechanical gyroscopes is of great importance. In this paper, the basic principle for testing the quality factor of micromechanical gyroscopes has been presented in details; specific approaches for testing the quality factor of inicromechanical gyroscopes, including electrostatic exciting; capacitive detecting and mechanical exciting; capacitive detecting, have also been presented.