摘要
激光预处理是提高光学薄膜激光损伤阈值的有效方法之一。本文就激光预处理前后增透膜损伤阈值的变化、破斑深度的变化、膜层中电场分布情况,分析了激光预处理对阈值的影响及原因。
Variations in defects of the antirefleetion films, including laser-induced damage threshold and damage depth before and after laser conditioning, were studied to understand influence of laser conditioning on the threshold and to optimize the technique.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2006年第4期321-325,共5页
Chinese Journal of Vacuum Science and Technology
关键词
激光预处理
增透膜
激光损伤
Laser conditioning, Antireflection, Laser-induced damage