摘要
介绍了声表面波传感器的结构及工作原理,及在压力、温度、气体测量中的应用,讨论了器件等效电路的参数设计.
The paper introduces the structure and working principle of surface acoustic wave sensors, discusses its applications on temperature, pressure, gas measurement, gives the design of the equivalent circuit parameters for surfact acoustic wave sensors.
出处
《传感器世界》
1996年第8期31-35,共5页
Sensor World
