摘要
提出了运用干涉仪的Fiducial功能确定干涉仪CCD的测量坐标系与非球面镜面坐标系的对应关系,然后对两者关系进行正交化拟合,从而标定出非球面干涉检验中的投影畸变,并用于某高次、离轴非球面进行干涉检验中的投影畸变标定,拟合精度为1.964 53μm。根据标定结果对干涉测量面形图重构,进行了数控抛光实验,最终面形精度达到均方根值λ/20(λ=0.632 8μm),证明拟合精度完全满足数控抛光的要求。
A calibration method was put forward for the projection distortion in interferometric testing of asphere surface. The method uses the Fiducial function of the interferometer to determine the relationship between the testing coordinate of the interferometer CCD and the coordinate of asphere mirror and make it orthogonalized fitting to calibrate the projection distortion of an off-axis and high order aspheric surface in interferometric testing phase, the fitting precision is 1. interferogram was used in the computer control polishing experiment, 964 53 μm. The reconstructed the fi shape is rms λ/20（λ=0.632 8μm）. The experimental results show that the f nal precision of surface itting precision satisfies the requirement of computer control polishing.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2006年第4期533-538,共6页
Optics and Precision Engineering
关键词
非球面检验
干涉术
Fiducial功能
投影畸变
干涉图重构
标定
aspheric surface testing
interferometry Fiducial function
projection distortion
inter ferogram reconstruction
calibration
