φ124 mm口径碳化硅质非球面镜面数控研抛技术研究

Research on computer controlled polishing technology of φ124 mm aspheric reaction-burned silicon carbide mirror

介绍了碳化硅质光学镜面的光学加工流程和加工手段,分析了碳化硅光学镜面的光学加工过程各个步骤中所应用的磨料和加工方法。利用自主研制的非球面数控加工中心,探索一种新型轮式研磨抛光技术,解决了中小口径非球面元件的数控加工问题,形成比较规范的中小口径碳化硅非球面元件加工方法,并应用到φ124 mm口径两面均为非球面的碳化硅元件的加工中,工件最终加工精度为第一面:0.761λ(PV)、0.059λ(RMS)(λ=0.632 8μm);第二面:0.834λ(PV)、0.089λ(RMS)(λ=0.632 8μm),满足了设计要求。

Based on Ф124 mm aspheric reaction-burned silicon carbide （RB-SiC） mirror, an aspheric computer controlled manufacturing center was designed, and an advanced wheeled polishing technology was developed to solve the problem of manufacturing and testing mid or small sized aspherics. The polishing equipment, abrasives and wheeled polishing technology were introduced. Some testing resuits of surface figure were given, it is showed that the first surface figure of the RB-SiC is 0. 761 λ （PV） and 0. 059 λ（RMS） （λ=0. 632 8.μm）, the second surface figure of the RB-SiC is 0. 834 λ（PV） and 0. 089 λ（RMS） （λ=0. 632 8μm） , respectively.