压电薄膜型精密运动平台研究

Research on precise traveling positioning stage driven by piezoelectric bimorph

提出了一种利用双压电晶片驱动小型平台的研究方案，该平台可实现水平面内的两自由度精密运动。在对粘滑型运动机构的工作原理进行分析的基础上，建立了压电式粘滑机构的动力学模型并进行了仿真分析，设计研制了试验样机，并从运动性能和承载能力两个方面对样机进行了实验研究。实验结果表明，设计的压电薄膜型精密运动平台结构简单、体积小、质量轻、步距稳定且行程大．电压低于30V驱动时，步距误差不超过0．5μm，承载能力约为自身质量的7～8倍。

Driven by piezoelectric bimorph actuator, a new precise positioning stage run in two directions within a horizontal plane was presented. Based on the analysis of the working principle of stick slip mechanism, a mathematical model describing its dynamic behavior was set up and simulated, experiments of traveling performance and bearing ability on the prototype were conducted. The results show that the designed stage has the advantages in simple structure, small volume, light weight, stable step size and large working range. As the driving voltage is below 30 V, the step error is less than 0.5/μm. The bearing ability of the stage is approximately 7-8 times its own mass.