压力传感器的零点电漂移与反向漏电问题

The Problems About Electric Drift of the Offset and Reverse Leakage Current for Pressure Sensors

指出过去在标征压力传感器的指标时,忽略了力敏电阻的非线性、零点电漂移、反向漏电流,但是这些问题对压力传感器的质量却有很大的影响;重点讨论了零点电漂移,并从理论上分析指出:零点电漂移起因于力敏电阻的非线性,可利用零点电漂移消除压力传感器的零热点漂移;讨论了造成力敏电阻非线性、电漂移、漏电流的各种因素,还提出一个表明零点热漂移和反向漏电流之间与传统公式不同的关系式。

It is pointed out in this paper that the problems about the non-linearity of plezoresistors, electric drift of the offset and reverse leakage current were omitted in characterization of pressure sensors, but they have great influence upon the quality of pressure sensors. The electric drift of the offset is discussed in details and the theoretical analysis points out that electric drift of the offset arises from the non-linearity of piezoresistors and that electric drift of the offset can be used for eliminating the thermal drift of the offset. In addition, an expression to show the relation between thermal drift of the offset and the reverse leakage current is presented, which is dif- ferent from the traditional one.