摘要
本文介绍一种新型集成压力传感器．它是利用集成电路技术和微机械加工技术相结合，将半导体力敏电阻和双稳态触发器电路结合在一起，制作触发器型集成压力传感器．文章对该类传感器的工作原理，电路结构进行了理论分析，并对实验结果进行了讨论．重点分析了噪声对传感器特性的影响，在测试电路中加入调控三角波电压，可以改善传感器的特性．
Abstract The paper describes a novel integrated pressure sensor. The piezoresistors are integrated with flip-flop.circuit. The sensor is fabricated by integrated circuit and micromechanic technique. The principle and circuit structure of the sensor are analysed. The experimental results are discussed. The noise effects on the characteristics of the sensor are analysed in detail. A controllable triangle wave voltage is added in the test circuits,which can improve the characteristics of the sensor.EEACC: 7230
关键词
集成压力传感器
传感器
集成电路
压力传感器
Digital integrated circuits
Pressure measurement
Pressure transducers
Trigger circuits
