纳米三坐标测量机不确定度分析与精度设计

Uncertainty Analysis and Accuracy Design of Nano-CMM

利用现代精度设计理念设计纳米三坐标测量机的结构,选用高精度的零部件进行组装,解决了传统阿贝误差问题,通过研究现代精度保障理论和技术,进行纳米级水平的误差源全面分析,推导各个不确定度分量的计算公式,根据给定的精度指标设计合理的精度,提出所需检定仪器的具体技术指标,精度设计的结果满足了纳米三坐标测量机的测量精度要求.

By using advanced accuracy design concept, Nano-CMM＇s structure is designed, which is set-up by choosing high degree of accuracy components. The traditional Abbe error is solved due to the design of the structure of the Nano- CMM. By studying the modem accuracy ensuring theory and technique, the nanometer level＇s analysis of total error source of the Nano-CMM is processed. The uncertainty calculating formula is deduced. The reasonable error distributing and design are clone according to the given accuracy target. The needed nanometer level calibrating instruments＇technic index are put forward. The result of accuracy design meets the measuring accuracy demand of Nano-CMM is made.